ICAPS 2026 registration is now open. Participants are invited to complete registration and submit abstracts first. Online payment (ECPay) will be available soon; further details will be announced on the official website.
Abstract submission deadline has been extended to June 26
We are pleased to announce the 2026 International Conference on Advanced Plasma for Semiconductors (ICAPS 2026). This year’s conference focuses on "Simulation, AI, and Plasma Processing for Semiconductors Manufacturing."
As the 2026 International Conference on Advanced Plasma for Semiconductors (ICAPS) approaches, we would like to remind all prospective authors and participants of the following critical dates for abstract submission and registration.