📢 Poster Presentation Program Now Available – Please See the Latest News for Details. • 📢 Poster Presentation Program Now Available – Please See the Latest News for Details. • 📢 Poster Presentation Program Now Available – Please See the Latest News for Details.

Abstract Submission

Submit your abstract for ICAPS — Poster presentation only

Home Abstract Submission

Abstract Submission

The abstract must be written in English.

Please download ABSTRACT TEMPLATE and make sure to submit in PDF file.

All abstracts must be submitted online via the ICAPS 2026 website.

Poster presentation only.

Please select the appropriate topics of interest when submitting your abstract online.

Download Abstract Template

Topics of Interest

Including but not limited to:

Plasma Science & Diagnostics [PS]

Plasma-Surface Interactions
Advanced Plasma Diagnostics
Atmospheric Pressure Plasma

Emerging Plasma for Semiconductor [EP]

Plasma for Next-Gen Logic & Memory
2D & Wide-Bandgap Materials
Atomic Layer Processing (ALP) and Plasma ALP

Advanced Packaging & Heterogeneous Integration [AP]

Dry Processes for Packaging
High-Density Plasma (HDP) for Packaging
Plasma for Hybrid Bonding & Surface Activation
3D IC & Chiplet Integration

Digitalization, AI & Equipment Intelligence for Plasma Processes [DA]

Digital Twin & Virtual Metrology for Plasma Processes
Physics-Informed Machine Learning
Autonomous Process Control

Sustainability & Green Manufacturing for Semiconductor [SG]

Green Plasma Etching Replacement
Energy-Efficient Plasma Sources
Subsystem Abatement

Miscellaneous [Misc]

All semiconductor and plasma related

Poster Presentation Competition

ICAPS hosts a Poster Competition. All are welcome to participate.

Poster Guideline

Presenters must submit their abstracts by the abstract submission deadline and select “Poster” as the presentation type during submission.
All posters must be prepared in English.
Poster size: A0, 841 mm (W) × 1189 mm (H)

Outstanding Poster
Award NTD 6,000

Excellent Poster
Award NTD 4,000

Distinguished Poster
Award NTD 2,000

Merit Poster
Award Certificate only

Evaluation Criteria

Research Originality & Significance – 30% Methodology & Technical Quality – 25% Q&A Performance – 25% Poster Organization – 20% < The award recipients will be announced during the Closing Ceremony. >