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Abstract Submission

Submit your abstract for ICAPS — Poster presentation only

Home Abstract Submission

Abstract Submission

The abstract must be written in English.

Please download ABSTRACT TEMPLATE and make sure to submit in PDF file.

All abstracts must be submitted online via the ICAPS 2026 website.

Poster presentation only.

Please select the appropriate topics of interest when submitting your abstract online.

Download Abstract Template

Topics of Interest

Including but not limited to:

Plasma Science & Diagnostics

Plasma-Surface Interactions
Advanced Plasma Diagnostics
Atmospheric Pressure Plasma

Emerging Plasma for Semiconductor

Plasma for Next-Gen Logic & Memory
2D & Wide-Bandgap Materials
Atomic Layer Processing (ALP) and Plasma ALP

Advanced Packaging & Heterogeneous Integration

Dry Processes for Packaging
High-Density Plasma (HDP) for Packaging
Plasma for Hybrid Bonding & Surface Activation
3D IC & Chiplet Integration

Digitalization, AI & Equipment Intelligence for Plasma Processes

Digital Twin & Virtual Metrology for Plasma Processes
Physics-Informed Machine Learning
Autonomous Process Control

Sustainability & Green Manufacturing for Semiconductor

Green Plasma Etching Replacement
Energy-Efficient Plasma Sources
Subsystem Abatement

Miscellaneous

All semiconductor and plasma related

Poster Presentation Competition

ICAPS hosts a Poster Competition. All are welcome to participate.

Poster Guideline

Presenters must submit their abstracts by the abstract submission deadline and select “Poster” as the presentation type during submission.
All posters must be prepared in English.

Outstanding Poster
Award NTD 6,000

Excellent Poster
Award NTD 4,000

Distinguished Poster
Award NTD 2,000

Merit Poster
Award Certificate only

Poster size

A1, 841 mm (W) × 1189 mm (H) The poster presentation schedule and location will be announced at a later date.