🔔 Early bird registration discount ends June 30, 2026!    •    🔔 Early bird registration discount ends June 30, 2026!    •    🔔 Early bird registration discount ends June 30, 2026!

Abstract submission deadline has been extended to June 26

Home Abstract submission deadline has been extended to June 26
Call for Papers

Abstract submission deadline has been extended to June 26

Organizer

FIP-SPE@FCU
Fraunhofer ist
FCU IPACDS

Co-organizers

國家科學及技術委員會補助
香港城市大學
清華五校聯盟
c sun志聖
大永真空
長達國際
cLPS
Trumpf
力寶來
德國經貿辦事處(AHK)
臺灣電漿科技協會(TAPST)
TACT
VON ARDENNE
SVC
Logo

Bringing together leading researchers, industry experts, and innovators to advance simulation, AI, and plasma processing for semiconductors manufacturing

Contact

Follow Us

©2026 ICAPS. All rights reserved.